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Vice versa, the Beta doorway can't be opened When the Alpha technique isn't existing or will not be completely linked. This ensures that the sterile setting of your container is shielded.
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Before the transfer of fabric, the Beta aspect is docked in the Alpha aspect. The rotation of your Beta aspect permits The 2 doors to connect into a single cell (Alpha/Beta) port.
The RTP has to be reachable by the process that performs the docking of the beta container. Just in case the docking of beta containers is done manually by an operator, thorough thing to consider must be designed also on the burden of your beta container and its content.
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Our thermal merchandise now involve a wide range of quick anneals starting from soak to spike to millisecond flash.
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Our Helios spouse and children RTP systems supply special double-side heating RTP technology. It could realize the best wafer temperature ramp charge when balancing wafer frontside and bottom temperatures, eliminate pattern-loading impact, offer exclusive wafer pressure management abilities, fulfill specialized demands for RTP procedures with various substrate thickness and machine structures, and realize the highest process productiveness simultaneously.
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This machine is designed especially for dynamic balancing across A variety of applications, making certain ideal effectiveness of your respective machines.